摘要
回顾了金属硅化物在电热元件、高温抗氧化涂层以及集成电路电极薄膜等功能元器件方面的应用、存在的问题和改进的措施。
The present status of metal silicides for use
as heating elements, high temperature oxidation resistant coatings as well as thin films for
largescale integrated circuit applications are reviewed. Some applications problems and solutions
to them are discussed. Research and development of the metal silicides as a new type of
high temperature structural materials are also overviewed.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
1999年第1期10-13,共4页
Rare Metal Materials and Engineering
关键词
金属硅化物
合金化
复合材料
功能硅合物
metal
silicide, alloying, composite, application, development
