退火温度对溶胶-凝胶法制备(Na,Mg):ZnO薄膜特性的影响

Effects of Post-annealing Temperature on Properties of(Na,Mg):ZnO Thin Films Derived by Sol-Gel Method

利用溶胶-凝胶法制备了具有良好表面形貌及c轴择优取向性的(Na,Mg):ZnO薄膜.重点研究了退火温度对薄膜结构性质的影响.扫描电子显微镜(SEM)图像及X射线衍射(XRD)图谱表明退火温度过高或过低都不利于薄膜良好表面形貌的形成及c轴择优取向生长.在一定范围内退火温度的升高,会使薄膜晶粒尺寸逐渐增大,薄膜表面形貌及c轴择优取向性得到改善,560℃为实验条件下的最佳退火温度.样品的荧光光致发光(PL)谱表明经560℃退火后的(Na,Mg):ZnO薄膜具有很少的缺陷及较高的结晶质量,是良好的紫外发光材料.

（Na,Mg）：ZnO thin films with good surface morphology and c-axis preferred orientation were prepared on pyrex glass substrates by sol-gel spin-coating method.The effects of the post-annealing temperatures on structural properties of the films were discussed in detail.The scanning electron microscopy（SEM） and X-ray diffraction（XRD） results show that neither too high nor low post-annealing temperature is benefit for the good structural properties including surface morphology and the c-axis preferred orientation of the（Na,Mg）：ZnO films.Within a certain temperature range,the crystallite size gradually increases along with the surface morphology and the c-axis preferred orientation of the films improved with the increasing post-annealing temperature.560 ℃ is the optimum post-annealing temperature under the experimental conditions.The Photoluminescence（PL） spectra of the samples demonstrate that（Na,Mg）：ZnO thin films after post-annealed at 560 ℃ have few defects and good crystallite quality,which is a kind of excellent UV luminescent material.