摘要
介绍了研制成功的掩模投影式实用型准分子激光微细加工机的主要技术指标、结构特点、研制中解决的关键单元技术，并简要介绍其应用。
The specification,constitution features and some critical problems for a practical excimer laser micromachining tool with mask projection techniques are described.Its applications are briefty introduced.
出处
《光学精密工程》
EI
CAS
CSCD
1999年第1期79-84,共6页
Optics and Precision Engineering
关键词
准分子激光刻蚀
微细加工机
激光加工
Excimer laser ablation,Micromachining,Mask projection techniques
