摘要
提出一个由定位干涉仪和测量干涉仪两部分组成的光纤干涉距离测量系统,并采用标准长度光纤实现量程倍增以增大测量范围。文中重点讨论了用准单色光源脉冲电流调制干涉实现光程定位的方法及其精度,通过理论分析和仿真实验可知,定位重复性误差优于±1μm。
In the paper,we put forward a new optic fiber interferometer to measure absolute distance consisted of a positioning interferometer and a measuring interferometer,and use the optic fiber having pre known length to enlarge the measuring range of the system.Meanwhile,we discuss the method and the accuracy of the optic path positioning of the system in detail.In theoretical analysis and experimental research,the positioning repeatablity error is ±1μm.
出处
《光学精密工程》
EI
CAS
CSCD
1999年第1期110-115,共6页
Optics and Precision Engineering
基金
国家自然科学基金
关键词
绝对测距
光程定位
脉冲电流调制
干涉仪
Optic fiber interferometer,Absolute distance measurement,Optic path positioning,Current modulation