三点法中测头角位置的精密测量方法

On the Precision Measurement Method for the Angular Positions of the Probes in Three Point Method

研究了三点法圆度及轴系误差测量中测头角位置的精密测量方法。设计了能直接测量非接触电容传感器测头实测状态下的角位置的测角系统，提出了克服测头角位置测量误差及三个测头灵敏度标定误差影响的校正方法。实验表明：采用本文提出的“多刻线”法测角精度优于１′，测头角位置测量误差及三个测头灵敏度标定误差对测量精度的影响可降致最小。

A study on the precision measurement method for the angular positions of the probes in roundness and spindle error motion with three point method has been carried out in this paper.A measuring system has been developed,which can simply measures the angular positions of the nontouching capacitance micrometer gauges under real measurement.A correction method is proposed,which can eliminate the effect of the angular position measurement errors and the calibration errors of the capacitance micrometer gauges on the roundness and spindle error motion measurements.Experiments show that the measurement error of the angular position of the probes measured by the multiple line method proposed in this paper is less than 1′,and the effect of the angular position measurement errors and the calibration errors of the capacitance micrometer gauges on the roundness and spindle error motion measurements can be lessened to minimum.