压电微定位系统的纳米分辨率线性化控制

Linearized Control Methods for Piezodriven Micro-positioning System with Nanoresolution

本文简述了压电非线性产生的原因及用电荷控制法实现纳米分辨率线性控制的机理，并提出采用谐波线性化方法在实现线性化控制的同时提高系统的动态特性。

The basic reason causing hysteresis of Piezoelectric actuator was analyzed.Based on it,the theory of Charge Control was expounded which is an important way to obtain linear relation between the displacement and the control signal.However,it doesn't provide sufficient linearity over a wide frequency range.So the theory of harmonic linearization was proposed to apply to this nature nonlinear system.Thus a new way is opening up to study the basic nonlinear characteristics and to improve the dynamic performance of this kind of system.