金属尖阴极阵列制备的研究

Study on the Fabrication of Metal Tip Cathode Arrays

】介绍了真空微电子中金属尖阴极的制备方法。给出了用二氧化硅凹模和硅Ｖ型模制备的金属尖的阴极照片，并比较了各自的特点。

This paper describes the method of metal tip fabrication for vacuum microelectronics. The photographs of the metal tip cathod arrays using “凹”shape SiO 2 molding and “V”shape si molding are also given, and their feature are compared respectively.