采用锁相技术的微小电容检测电路

Measurement Circuit of Small Capacitance by Lock-in Technology

】描述了一种应用于电容式传感器的微小电容检测电路，此电路采用锁相技术的原理，成本较低，具有较好的线性度和较高的灵敏度。

In this paper a new circuit to measure small capacitance is proposed. The method is based on the principle of lock-in detection and provides good linearity and high sensitivity. With its low cost, this circuit can be applied to micromechanical capacitance sensors and actuators.