直流等离子体喷射镀膜设备的传热数学模型

Mathematical Model of Heat Transfer in an Apparatus Used toCoated Film by Direct Current Plasma Jet

介绍了对直流等离子体喷射镀膜设备中传热过程所进行的理论和实验研究，探讨影响上述复杂传热过程的各种因素的影响规律及各种因素之间的相互关系，以及对有效控制金刚石膜形成的影响程度．在理论研究的基础上，建立了射流温度分布以及辐射、寻热及基片热平衡等5组数学模型，并进行了编程计算，计算结果与实验结果对比，证明两者吻合很好．

Energy system of the equipment used to make diamond film by the direct currentplasma jet (DC-PJ) was studied. Based on analyzing mechanism of heat transfer， the theory andexperiment which research the level of varies of factors and the relationship of the factors were introduced. Five mathematic models according to temprature distrbution， radiation,convection,transferenceand heat balance were set up and calculated by this program， and got a consistent result both bycalculation and by experiment.