摘要
目的对一种高精度、高频响的电容测微仪系统进行改进．方法以８阶Ｂｕｔｔｅｒ－ｗｏｒｔｈ滤波器ＭＡＸ２９１为核心元件，设计了该系统的动态测量电路，提出了电容测微仪系统动态特性的测试与标定方法．结果与结论改进后的电容测微仪在±１０μｍ的量程内非线性误差最大不超过０．８０％，重复性精度优于０．１５％，测量精度优于０．１０μｍ，频响范围达４．２ｋＨｚ．
Aim To develop an improved capacitance micrometer with high accuracy and frequency response. Methods Its dynamic measuring circuit adopted an 8 order Butterworth filter as the key device, the test and calibration methods of the dynamic characteristics of the capacitance micrometer were proposed. Results and Conclusion The frequency response range of the improved capacitance micrometer is up to 4 2 kHz, the maximal relative nonrepeatability and the nonlinear errors are less than 0 15% and 0 80% respectively, and the measurement accuracy is better than 0 10 μm within the range of ±10 μm.
出处
《北京理工大学学报》
EI
CAS
CSCD
1999年第1期87-91,共5页
Transactions of Beijing Institute of Technology
基金
高等学校博士学科点专项科研基金
关键词
电容测微仪
标定法
主轴
机床
回转运动精度
filtering circuit
frequency response
capacitance micrometer
calibration
