表面粗糙度的激光在线测量

Real time measurement of surface roughness using laser technique

为了克服现有方法在表面粗糙度测量范围和抗震动等方面的不足，分析了最近发展起来的几种动态表面粗糙度测量方法的优缺点，提出采用被测表面激光反射图的暗区比来实现运动表面粗糙度的实时测量。该方法的测量范围可达３０倍跨度，即可测量的表面粗糙度为０．０５μｍ到１．６μｍ或０．４μｍ到１２．５μｍ。分析了试样的运动速度和初试平均光强对暗区比的影响，该方法的测量结果与Ｔｅｌｙｅｒ－ｓｏｆｔ表面形貌测量仪的测量结果很吻合。

A discussion about recently developed methods for measuring the roughness of the dynamic surface in process has been taken. In order to overcome disadvantages of the present methods, a new technique using dark region ratio of the reflected laser to determine the dynamic surface roughness is proposed. The measuring range of surface roughness is from 0.05μm to 1.6μm or from 0.4μm to 12.5μm which is related to the reflected initial average optical intensity. The influence factors such as speed, initial optical intensity on the dark region ratio have been discussed. The measuring results are very close to that measured by Telyer soft.