基于随机共振和微纳传感器阵列的六氟化硫检测方法研究

Detection of Sulfur Hexafluoride Based on Stochastic Resonance and Miniaturized Sensor Array

建立了一种基于随机共振和微纳传感器阵列的六氟化硫气体检测方法。使用两个360μm极间距离的微纳传感器构成的阵列结合随机共振算法,在室温常压,相对湿度70%的条件下检测3.0～24g/m3SF6气体及纯SF6气体,以信噪比极大值实现各浓度SF6气体的区分。传感器工作于微电离平衡状态,检测过程中无有害气体产生,安全性较高。为检验该方法的实用性,依据国家标准在温度20℃、相对湿度70%和常压条件下模拟现场检测3.0～12g/m3SF6气体,结果表明:本方法具有较好的重复性和实用性。

A sulfur hexafluoride （SF6） detecting method based on stochastic resonance and miniaturized sensor array was proposed.A sensor array,including two miniaturized gas sensors with 360 μm interelectrode distance,combined with stochastic resonance algorithm was adopted for SF6 detection.Under the conditions of room temperature,normal pressure,and 70% relative humidity,detecting experiments of SF6 in eight concentrations （ranging from 3.0 g/m3 to 24 g/m3） and pure SF6 gas were conducted.SF6 gas in various concentrations could be distinguished by signal-to-noise ratio maximums.The miniaturized gas sensor worked in its micro-ionization balance state and no poisonous gas was generated during detection,which was safe for the operators.To validate the practicability of the system,simulating field detection of SF6 gas in five concentrations （ranging from 3.0 g/m^3 to 12 g/m3） was carried out under the conditions of 20 ℃ temperature,70% relative humidity,and normal pressure.The results demonstrated the proposed method presented good repea-tability and practical application value.