基于DeviceNet现场总线的快速热处理设备控制系统设计

A DeviceNet Bus-Based Control System Design for Rapid Thermal Processor

介绍了一种基于DeviceNet现场总线的快速热处理设备控制系统。首先介绍了该系统的硬件构成,本控制系统采用了基于现场总线和模块化设计思想,使得该系统的能够满足快速热处理设备的加热腔的数量可任意配置,具有很好的可扩展性;然后提出了一个分层的、模块化的、可配置的软件控制系统,并对其进行了简要概述;最后设计了一个基于系统模型的温度控制器,该控制器采用了前馈控制与反馈控制相结合的方法,其中,前馈通道用来预测控制输出,从而提高了系统响应速度;反馈通道用来修正模型误差和外界干扰,从而提高了控制系统的鲁棒性和控制精度。

A DeviceNet bus-based control system for rapid thermal processor system has been presented. First, the hard architecture of this control system has been described. The distinct character of this control system is a open and expandable system that it is adapt to the numble of the processing chambers can be changed by custom＇ s needs. Second, a hiberarchy and modulization soft system has been presended and summarized. Lastl, a temperature controller has been designed for this control system of RTP. The temperature controller is combined feed forward and feedback mechanisms. The feed forward mechanism is used to calculate a prediction of output of the system, so it can improve responding rapidity of control system. The feedback mechanism is used to compensate for modeling errors and disturbance. This control system for RTP has been implemented and evaluated by simulation as well as experimental equipment.