基于波像差理论的光学系统评价函数

Optical system merit function based on aberration theory

将Lu的平面对称光学系统的波像差理论与Koike定义的极紫外(XUV)光栅仪器的评价函数相结合,从而可以得到该评价函数关于光学系统参量的解析表达式。应用该评价函数优化一XUV单色仪光学系统,并运用光线追迹程序Shadow对该光学系统的优化结果进行数值成像计算和比较,证明现发展的评价函数是一种优化XUV光栅仪器十分有用的手段。

Integrating the aberration theory of plane-symmetric optical systems recently developed by Lu with the merit function of extreme ultra-violet （XUV） grating instrument defined by Koike, consequently the merit function can be expressed as a function of optical parameters. Optimize a XUV monochromator optical system with this merit function, and use ray tracing program Shadow to check it. The imaging calculations show that the merit function we developed is a very useful means to optimize the XUV grating instruments.