波长扫描干涉仪信号处理技术

Signal Processing Techniques for Wavelength Scanning Interferometry

提出了一种可用于绝对距离测量的光纤扫描干涉仪。基于数字信号处理技术，设计了一种算法，从而有效地提高了相位的分辨率、滤除噪声和干扰并克服了扫描过程中波长的随机晃动，可达到距离测量所要求的０．０５μｍ的精度和０．

A novel wavelength scanning fiber optic interferometer for absolute distance measurement has been proposed. Based on the digital signal processing techniques, an algorithm to effectively discriminate phase information, eliminate perturbations and overcome the random drifts of the scanning wavelength, is established. So, the practical demands of a precision 0.05 μm and a resolution 0.01 μm are met.