低损耗玻璃光波导的溶胶-凝胶法制备

Fabrication of Low loss Silica on Silicon Waveguides with Sol gel Techniques

采用溶胶－凝胶（Ｓｏｌ－ｇｅｌ）技术制备了ＳｉＯ２－ＴｉＯ２低损耗平面光波导，在６３３ｎｍ处的传输损耗为０．５７ｄＢ／ｃｍ。同时在硅基板上制备了脊型Ｙ形波导分束器，分束比为１１。

Low loss SiO 2 TiO 2 waveguides were fabricated with sol gel techniques. Propagation loss of 0.57 dB/cm was obtained at 633 nm. A Y branch channel beam splitter was also fabricated on a Si substrate. The branch ratio is approximately 1∶1.