摘要
当今传感器的明显发展趋势是从传统的传感器设计和应用转向以微机械加工技术为基础的微传感器和智能化传感器的设计和应用，使智能结构的实现成为可能。本文就传感器技术的现状和未来的发展予以综述，发展微传感器对我国仪器仪表工业的重要性略加讨论。
It is obvious that the development of modern sensors is in a process of transition from tranditional design and application of conventional sensors to the micromachiningbased design and application of microsensors and intelligent sensors, thus making possible the implementation of intelligent structures. The present paper summarizes the state of the art and the future development of sensor technique. It also gives a brief discussion of the importance of dricrosensors to the development of instrumentation industry of our country.
出处
《测控技术》
CSCD
1999年第3期1-4,共4页
Measurement & Control Technology
关键词
微传感器
智能化
传感器
微机械加工
现状
展望
microsensors,intelligent sensors, micromachining technique,micro-electro- mechanical systems(MEMS), intelligent structures
