扭摆式微机械加速度计的系统研究

Research on Pendulous Micromechanical Accelerator System

扭摆式微机械加速度计是近年来才开始发展的一种新型加速度计。介绍了这种新型加速度计的机械结构、工作原理，根据其测试特点，对其关键部分进行了探讨。在此基础上，对整个加速度计系统的误差来源进行了分析。

Pendulous micromechanical accelerator is a new kind of accelerator, which was developed in the last several years. The accelerator's mechanical structure and the principle of operation are presented. According to the testing peculiarity, the most important part of its test system is discussed. On the base, the ermr sources of the whole accelerator's system are analyzed.