GCr15钢表面钽沉积及氮离子注入的磨损性能

Anti Wear Property of GCr15 Steel by Ta Deposition and N Ion Implantion

利用磁控溅射法在GCr15轴承钢表面沉积厚约100nm的钽膜,然后对其进行氮等离子体基离子注入,注入能量为50keV,利用GXRD分析改性层的组成相结构,用Φ6mm的氮化硅球作为对磨件测试处理后试样的磨损性能,并利用SEM结合EDX观测磨痕的形貌及成分,探讨其磨损机制。结果表明,改性层含有钽的氮化物,注入剂量较低时,化合物是TaN0.1,随着注入剂量增加,形成TaN;GCr15钢经过处理后能够提高磨损性能,摩擦系数有所降低:表面经过处理后,摩擦系数由未处理前的0.8～1下降至0.2～0.3,同时磨损量大幅度降低,降低幅度达到88%。注入层的磨损机制主要以磨粒磨损为主,兼有粘着磨损。

Tantalum films were deposited on bearing steel GCr15 with thickness of 100 nm by magnetron sputtering. Nitrogen was implanted into above films using Plasma Base Ion Implantation（PBII） with the energy of 50 keV, and with various implantation dose. Wear resistance test were performed on ball-disk friction tester againsting Si3N4 ball with diameter of 6mm. SEM was used to analyze the morphology of wear track. The XRD patterns show that the modified layers contain TaN0 t; with the implantation dose increasing, TaN begins to form. The wear rate of the sample deposited with Ta film and implanted with 2.5× 10^17 ions/cm^2 nitrogen decreases by a factor of 88% compared with the untreated under the condition of 1 N load and 60 mm/s sliding speed and the friction coefficient decreased from 0.8-1 to 0.2-0.3. The main wear mechanism is abrasive wear and adhesive wear.