微波水热法制掺铈SnO_2纳米气敏材料及其性能

Preparation and Sensing Properties of Tin Oxide Nanoparticles Doped with Ce^(3+) by the Microwave Hydrothermal Synthesis

采用微波水热法制备SnO2纳米粉体,应用X射线衍射(XRD)、透射电子显微镜(TEM)和扫描电子显微镜(SEM)对粉体进行结构表征和微观形貌观察;以所得粉体为原料制备厚膜气敏元件,对其进行气敏性能测试。结果表明:铈离子(Ce3+)的掺杂对SnO2晶粒的生长有抑制作用,掺杂后颗粒粒径约为50 nm;前驱体煅烧温度为700℃时,Ce3+的掺杂可改变SnO2气敏元件对某些气体的灵敏度,当工作温度为370℃时,掺杂x(Ce3+)=5%的气敏元件对乙醇的灵敏度达到20.5,对丙酮的灵敏度达到22,均高于未掺杂Ce3+的气敏传感器的灵敏度;Ce3+的掺杂可以降低厚膜气敏元件的本征电阻,提高其工作稳定性。

Tin oxide nano-powders were prepared by the microwave hydrothermal synthesis method and characterized by XRD,TEM and SEM,then tin oxide thick-film gas sensors have also been fabricated using conventional thick-film preparation method and the gas sensing properties were tested and analyzed.The results show that the crystal grain growth is restrained because of doping of Ce3＋,with the grain diameter about 50nm;when the calcining temperature is 700℃,the doping changes the sensitivity of tin oxide thick-film gas sensors to some gases;when gas sensors with doping x（Ce3＋）=5%,working at 370℃,the gas sensitivity to ethanol is 20.5 and 22 to acetone,which are both higher than that of pure gas sensor of tin oxide;the intrinsic resistance of tin oxide thick-film gas sensors is decreased,and its work stability is improved.