可溶性聚酰亚胺溶剂体系的研究

STUDY ON THE SOLVENT SYSTEM OF SOLUBLE POLYIMIDE

研究了可溶性聚酰亚胺的溶剂体系，研究了聚酰亚胺在各种纯溶剂及混合溶剂体系中的溶解性能，各种溶剂体系的相对吸水能力，它们及对应的聚酰亚胺溶液与硅片表面的接触角。研究发现在聚酰亚胺的良溶剂ＮＭＰ、ＤＭＡ中可加入多至５０％体积的非溶剂乙二醇醚类，混合溶剂仍能溶解所研究的聚酰亚胺；而乙二醇醚的加入可有效地降低溶剂体系的吸水性。所研究的各种溶剂体系均可在硅片表面上完全铺展，而聚酰亚胺溶液与硅片表面的接触角随聚酰亚胺的浓度上升而明显上升，基本与所用的溶剂体系无关。

The solubility of the polyimide in various pure and mixed solvents, the ability of moisture absorption of the solvents and the contact angle of the solvents and corresponding polyimide solutions with the silicon chip were examined. It is observed that a mixed system of a solvent of the polyimide, such as NMP or DMA, and up to 50 volume% of a non solvent, such as an ether derivative of glycol, can still dissolve the polyimide. The addition of ether derivatives of glycol in a solvent can reduce its ability of moisture absorption effectively. All solvents studied are observed to be fully extended on a silicon chip surface. The contact angle between a polyimide solution and the silicon chip surface increases obviously with the concentration of the solution and is almost independent of the solvent system.