有效提高半导体设备可靠性的故障树分析法

Application of Fault Tree Analysis for Improving the Semiconductor Device Reliability

通过对故障树分析法的运用,建立了半导体设备系统的故障树。对该故障树进行了定性分析和定量分析,求解出故障树的最小割集。分析了该系统的薄弱环节,并采取补救措施。通过对采取措施前后故障树顶事件发生概率和系统可靠度的计算、分析、比较,证明了故障树分析法是一种有效可行的提高半导体设备可靠性的分析方法,该方法也适用于其他设备仪器。

Through the use of fault tree analysis,a semiconductor equipment system fault tree was established.The qualitative analysis and the quantitative analysis to the fault tree were carried on.A minimum cut set of fault tree was extracted and the weaknesses of the system were analyzed,remedial measures were taken.Through the calculation,analysis,comparison to the probability of the top event of the fault tree and system reliability between before and after the remedial measures,it proves that the fault tree analysis is a feasible and effective analysis method for improving the reliability of semiconductor equipments,and it is also suitable for other equipments and instruments.