热处理对化学镀钴磷薄膜组织结构和磁学性能的影响

The Effect of Thermal Treatment on Structure and Magnetic\=Properties of Electroless Deposited Cobalt-Phosphorus Film

化学镀钴磷薄膜具有优良的磁学性能。研究了不同的热处理条件下薄膜组织结构对磁学性能的影响。化学镀钴磷薄膜镀态下为单一的α－固溶体，矫顽磁力和矩形比较高，具有磁各向异性。随着温度的升高，依次析出ＣｏＰ２和Ｃｏ２Ｐ相，并由密排六方结构的α－Ｃｏ向面心立方结构的β－Ｃｏ转变；矫顽磁力经２００℃，１ｈ热处理后达到最大值，随后呈下降趋势。

Electroless plated cobalt-phosphorus film has good magnetic properties. The effect of film structure on its magnetic properties at varied temperature was studied. Electroless deposited cobalt-phosphorus film is pure solid solution, which has high coercive force, squareness ratio and anisotropy. When the film was heated, phases of Co2P and CoP2 deposited from the solid solution and allotropic transformation took place from hexagonal close-packed system to face-centered cubic lattice. Coercive force reached a peak value when heated to 200 for one hour and then decreased with the raise of the temperature. The squareness ratio fluctuated in a certain range with the variation of the temperature.