基于等效膜层理论的1/4规整膜系薄膜偏光分束镜

Quarter Periodic Multilayer Polarizing Beam Splitter Based on Equivalent Layers Theoretics

为了设计制作1/4规整膜系的高性能薄膜偏光分束镜,根据三层对称膜系结构的等效膜层理论和截止带理论,设计了两种对称膜系结构的偏光分束镜。利用TFCalc薄膜软件对两种膜系结构偏光分束镜的分光光谱特性进行了模拟。利用电子枪蒸镀法分别制备了两种膜系结构的偏光分束镜（580~780 nm）,并利用分光光度计和搭建的消光比测试系统,对两种膜系结构偏光分束镜的透射率和消光比进行了测试。结果表明,两种膜系结构的偏光分束镜在设计分光光谱范围内透射率可以达到90%以上,消光比优于3×10-3,与理论设计吻合得很好。

In order to design and fabricate quarter wavelength high performance polarizing beam splitter（PBS）,based on equivalent layers concept and stopband theoretics,two types quarter wavelength periodic multilayer PBS are proposed.The TFCalc software is used for the calculations and analysis.The polarizing beam splitters are fabricated by electron gun vapour deposition in spectrum range of 580~780 nm.The transmissivity characteristic of PBS is investigated by spectrometer,and the extinction ratio characteristic is measured by the constructed setup in the experiment.The experimental results indicated that the transmissivity reachs 90% or more,and the extinction ratio is better than 3×10-3.The experimental results consistent with theoretical performance of the layer design.