摘要
本文综述了碳热还原反应制备AlN的各种反应机制,并进行了评述,详述了气-固反应机制和固-固反应机制的特点、实验证据及存在的不足。认为Al2O3蒸发分解零级反应与固相扩散反应共存的机理能较好地解释目前的实验现象,但仍需进行完善。
Several mechanisms of AlN synthesis by carbothermal reduction nitridation method were reviewed.The contents,evidences,experimental phenomena and drawbacks of two mechanisms, i.e.gas-solid reaction and solid-solid reaction mechanisms were discussed in details.It was believed that the evaporation reaction mechanism and solid-solid reaction mechanism coexisted in the carbothermal reduction nitridation process.Compared with others,this theory seemed more rational and could explain more experimental results.
出处
《硅酸盐通报》
CAS
CSCD
1999年第1期35-39,共5页
Bulletin of the Chinese Ceramic Society
关键词
碳热还原反应
氮化铝
半导体陶瓷
carbothermal reduction nitridation,AlN synthesis,reaction mechanism,gas-solid reaction,solid-solid reaction