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碳热还原法制备氮化铝反应机制的研究进展 被引量:9

Review of Mechanisms of Carbothermal Reduction Nitridation Reactions
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摘要 本文综述了碳热还原反应制备AlN的各种反应机制,并进行了评述,详述了气-固反应机制和固-固反应机制的特点、实验证据及存在的不足。认为Al2O3蒸发分解零级反应与固相扩散反应共存的机理能较好地解释目前的实验现象,但仍需进行完善。 Several mechanisms of AlN synthesis by carbothermal reduction nitridation method were reviewed.The contents,evidences,experimental phenomena and drawbacks of two mechanisms, i.e.gas-solid reaction and solid-solid reaction mechanisms were discussed in details.It was believed that the evaporation reaction mechanism and solid-solid reaction mechanism coexisted in the carbothermal reduction nitridation process.Compared with others,this theory seemed more rational and could explain more experimental results.
机构地区 西安交通大学
出处 《硅酸盐通报》 CAS CSCD 1999年第1期35-39,共5页 Bulletin of the Chinese Ceramic Society
关键词 碳热还原反应 氮化铝 半导体陶瓷 carbothermal reduction nitridation,AlN synthesis,reaction mechanism,gas-solid reaction,solid-solid reaction
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  • 1黄莉萍,黄熊璋,符锡仁,沈宝珍.氮化铝粉末的制备[J]硅酸盐学报,1986(03).
  • 2黄莉萍,黄熊璋,符锡仁,沈宝珍.氮化铝粉末的制备[J]硅酸盐学报,1986(03).

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