燃焰法沉积高品质透明金刚石薄膜的研究

Study on the Depositing High Quality Transparent Diamond Films by Combustion Flame Method

采用燃焰法在大气环境下以３０μｍ／ｈ的较高速率沉积出了均匀、优质、透明的金刚石薄膜。实验结果表明，较高的Ｖ（Ｏ２）／Ｖ（Ｃ２Ｈ２）和适中的基体温度是获得高品质金刚石薄膜的基本条件；提高反应气体中氧气浓度，可使沉积高品质透明金刚石薄膜的基体温度范围变宽。

The uniform high quality,transparent diamond films is deposited under the atmosphere with a higher rate of 30μm/h by the combustion flame method.The experimental result showed that the higher V (O 2)/ V( C 2H 2) ratio and the moderate substrate temperature are the basic conditions of obtaining high quality diamond films,Increasing the oxygen percentage of reaction gas ,the substrate temperature range of the deposited high quality transparent diamond films can be widened.