基于小波分析的纳米运动平台振动研究

Researches on Nano-motion Stage’s Vibration Based on Wavelet Analysis

大行程纳米运动平台在宏微双驱动纳米定位系统中作为宏动台,其内部的振动、特别是运动方向的振动,对运动精度或定位精度会产生直接的影响。文章在研究纳米运动平台振动机理、特征数据提取方法的基础上,结合虚拟仪器技术,采用小波分析与傅立叶变换对比分析方法,对平台全工作行程内的振动状况进行详细的分析与研究。由实验证明,小波分析方法可获得平台各精确位置上的振动特征数据,将其作为确定控制参数的依据,能显著改善平台的运动控制性能。

Large stroke Nano-motion stage is used as macro-stage in dual-driving nano-positioning system. The interior vibration, especially the vibration of movement direction will have a direct impact on the accuracy of motion and positioning. Based on the nano-motion stage＇s vibration mechanism, feature data extraction method and the virtual instrument technology, the full working stroke of the stage＇s vibration is researched with the contrast analysis of wavelet analysis and Fourier transform. It is proved that the wavelet analysis method, which as the basis for determining control parameters, is more precisely in acquiring the vibration feature data at exact location of the stage, and significantly improves the performance of motion control stage.