摘要
运用超声雾化热分解法制备了纯TiO2薄膜,并通过超声雾化分解和电子束蒸发两种方法注入了Ru,Rh,Ir杂质,研究了各种薄膜对O2的传感特性,并利用透射电镱和原子力显微镜分析薄膜晶体的微观结构。实验发现,纯TiO2薄膜在高工作温度(400℃)下对O2的传感性也较弱,而通过超声雾化分解法制备的掺杂TiO2薄膜工作温度明显降低到300℃,传感灵敏度极大提高,响应时间缩短,并且超声雾化分解法制备比电子束蒸发注入的传感薄膜具有更好的气敏传感特性。
The TiO2 films were deposited and doped with Ru,Rh and Ir impurities,respectively,by ultrasonic spray pyrolysis （USP）and electron beam evaporation.The impacts of film growth conditions and doping on its quality were studied.The microstructures and oxygen sensing property of the different TiO2 films were characterized with transmission electron microscopy and atomic force microscopy.The results show that the doping of Ru,Rh and Ir significantly improves the oxygen sensing characteristics of the TiO2 films.For instance,the TiO2 films grown and doped either with Ru,or Rh or Ir catalysts by USP have much lower reaction temperatures,higher sensitivities and faster response times than those of the un-doped TiO2 film,and the films grown by electron beam evaporation.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2010年第4期385-389,共5页
Chinese Journal of Vacuum Science and Technology
基金
重庆市教委自然科学基金(KJ090801)
重庆师范大学光学工程重庆市重点实验室资助课题(0902)
