利用一维光栅标样校准扫描电子显微镜方法的研究

Study on SEM Calibration with 1D-grating Samples

提出了扫描电子显微镜量值溯源的测量方法，对3种类型的10台电镜进行了比对实验。实验数据溯源于国家长度基准。比对实验选取显微镜的放大倍数分别为2000×、5000×、10000×、20000×和50000×所对应的标尺作为测量对象。实验结果表明，有8台扫描电镜的标尺的准确度在5％的范围内与标准值符合，其余2台在6．5％的范围内与标准值符合。

The method for scanning electron microscope traceability is described. 10 Scanning Electron Microscopes （SEM） of three different electron gun types were measured. The experimental data was traced to the national length primary standard. The marker at 2000 ×, 5000 × , 10000 ×, 20000 × and 50000 × magnifications was measured. The derivations of 8 SEM magnifications are less than 5% , and the others are less than 6.5%.