摘要
NO2是一种主要的大气污染物,同时对人体健康也有较大的危害,针对其进行检测的传感器的研究和开发就显得十分重要。声表面波气体传感器具有便携性、快速响应、高灵敏度、高稳定性、低成本等特点,引起了国内外相关研究者的广泛关注。简要介绍了声表面波(SAW)气体传感器工作的基本原理、传感器敏感膜与NO2气体的作用机理以及SAW-NO2气体传感器的两种结构类型,综述了SAW-NO2气体传感器常用的几种敏感膜材料,并对SAW-NO2气体传感器的发展趋势做了展望。
NO2 pollutes the air seriously and is harmful to man＇s health.It is urgent and important to develop sensors for NO2 detection.Surface acoustic wave gas sensors have been studied widely because they have advantages of small size,fast response,high sensitivity,good stability and low cost.The principle of SAW gas sensors and the mechanism of reaction of sensitive film and NO2 gas is introduced.Two sorts of structure of SAW-NO2 sensor and several sensitive film materials are reviewed.The development trends of SAW-NO2 sensors are discussed.
出处
《化学传感器》
CAS
2010年第2期21-26,共6页
Chemical Sensors
基金
国家重点基础研究发展计划资助项目(No.2009CB939703)
关键词
声表面波
NO2传感器
延迟线
谐振器
敏感膜
surface acoustic wave（SAW）
NO2 sensors
delay line
resonator
sensitive film
