摘要
The grain size and surface morphology of sputtered Au films are studied by x-ray diffraction and atomic force microscope. For as-deposited samples the grain growth mechanism is consistent with the two-dimensional （2D） theory, which gives relatively low diffusion coefficient during deposition. Annealing process demonstrates the secondary grain growth mechanism in which the thickness dependence of grain boundary energy plays a key role. The surface roughness increases with the increase of grain size.
The grain size and surface morphology of sputtered Au films are studied by x-ray diffraction and atomic force microscope. For as-deposited samples the grain growth mechanism is consistent with the two-dimensional （2D） theory, which gives relatively low diffusion coefficient during deposition. Annealing process demonstrates the secondary grain growth mechanism in which the thickness dependence of grain boundary energy plays a key role. The surface roughness increases with the increase of grain size.
基金
Project supported by the National Basic Research Program of China(Grant No.2006CB91304)
the Knowledge Innovation Program of the Chinese Academy of Sciences
