摘要
超净高纯试剂是微电子技术发展过程中不可缺少的关键基础化工材料之一,一代微细加工技术需要一代超净高纯试剂与之配套。简要介绍了国内外微电子技术中集成电路、分立器件和液晶显示器件等制作技术的现状及发展趋势,介绍了超净高纯试剂在微电子技术发展过程中的几种主要应用及关键品种,阐述了国内外超净高纯试剂的现状及发展趋势,指出了我国超净高纯试剂的技术与产业化等方面与国外存在的主要差距和主要问题,最后指出了我国近期超净高纯试剂的产业化和研发的主要方向。
Chemicals are the one materials of key chemicals. One generation microelectronical technology needs one generation Ultra - clean and High purity chemicals. In this paper, the developing trend of the manufacturing technology for integrated circuit, discrete device and liquid crystal display device is presented,and also introduce the application and the developing trend of ultra - clean and High purity chemicals at home and abroad,and the problems needs to be solved. At last,the developing directionof process chemicals as to the needs for the development of the Chinese microelectronical chemical technology.
出处
《微处理机》
2010年第3期1-5,共5页
Microprocessors
关键词
微电子技术
超净高纯试剂
应用
发展
Microelectronics
Process Chemicals
Application
Development
