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基于MEMS技术的WSS中“兔耳”现象的研究

Study on "rabbit ear" phenomena in MEMS technology-based wavelength selective switches
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摘要 在典型的微电子机械系统(Micro electro-mechanical systems,MEMS)型波长选择开关(Wavelength selective switch,WSS)中,一般使用双轴MEMS微镜来实现波长切换与光功率的衰减。文章从理论上研究了基于MEMS技术的WSS在实现衰减功能时"兔耳"现象产生的机理,并进行了实验验证。实验表明,用衍射理论的解释与实验结果能够较好地吻合。 In typical Micro Electro-Mechanical Systems(MEMS)-based Wavelength Selective Switches(WSS),bi-axial MEMS micro-mirror technology is usually used to achieve wavelength cutover and optical power attenuation.In this paper,the mechanism for the cause of the so-called "rabbit ear" phenomenon in MEMS-based WSS in power attenuation is theoretically studied and experimentally verified,which shows that the explanation by using the diffraction theory is in good agreement with the experimental results.
出处 《光通信研究》 北大核心 2010年第4期52-53,66,共3页 Study on Optical Communications
基金 国家"九七三"计划资助项目(2010CB328300) 国家"八六三"计划资助项目(2009AA03Z443)
关键词 波长选择开关 “兔耳” 微电子机械系统 WSS "rabbit ear" MEMS
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参考文献5

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