单晶片主动式放大阀压电泵的设计与实验研究

Design and Experimental Research on the Piezoelectric Pump with Hydraulic Pressure Magnification Valve and Unimorph Actuator

设计了膜式液压放大机构,具有机构简单、放大倍数大的优点,同时解决了密封难,制造成本高的问题。对于单晶片主动式放大阀压电泵,通过实验测试了频率-流量特性和电压-流量特性。以驱动电压为150 V、阀膜厚度H=0.4 mm为例,压电振子中心点的变形量为45.861μm,放大倍数约为9倍。对理论流量与实测流量进行分析对比,结果表明,当阀口最大开度在0.2-0.4 mm时,该阀具有良好的通流能力及截止性。

An enlarged hydraulic membrane structure was designed in this article,which had the advantages of simple structure and large magnification,solving the problems of airproof and high manufacturing costs at the same time.As for the film piezoelectric pump hydraulic valve amplification,the characteristics of frequency-flow and the voltage-flow were tested through experiments.For example,when the drive voltage was 150 with H（height of the membrane） of 0.4 mm,the deformation of the center of actuator was 45.861 μm,magnification was nine times.Comparative experiments between theory flow and measured flow proved that the valve had good flow and the ability to cut-off when the valve width was 0.2 mm to 0.4 mm.