摘要
介绍了一种新型的基于高性能锆钛酸铅(PZT)厚膜(压电常数d31约为-280 pm/V)的微机电系统(MEMS)压电超声换能器。基于有限元法,对该种压电超声换能器进行了模拟设计。优化结果表明,边长2 mm的超声换能器,优化后其共振频率约为170 kHz,有效机电耦合系数可达7.19%。此外,根据模拟结果,制备了超声换能器并进行了测试,共振频率为119 kHz的换能器,其有效机电耦合系数最大为6.39%,共振时中心振幅约为4.8μm@50V,并分析了模拟结果与实验结果产生误差的原因。
A new type of piezoelectric micromachined ultrasonic transducer（pMUT） based on PZT thick film with excellent properties（d31=-280 pm/V） was investigated.The simulation design of this piezoelectric ultrasonic transducer has been carried out by Finite Element Method（FEM）.The optimization result showed that the transducer with the side length of 2 mm could obtain the resonance frequency of 170 kHz and the effective coupling coefficient of 7.19%.Furthermore,pMUT based on PZT thick film were fabricated and tested.The resonance frequency,center resonant amplitude and the largestest effective coupling coefficient are 119 kHz,4.8 μm@50 V and 6.39%,respectively.The deviation between FEM and experimental result was analyzed.
出处
《压电与声光》
CSCD
北大核心
2010年第4期604-607,共4页
Piezoelectrics & Acoustooptics
基金
安徽省自然科学基金资助项目(090412027)
