色散条纹传感技术用于拼接镜面位移探测的仿真研究

Simulation study on measuring piston error of segmented mirror using dispersed fringe sensoring technology

根据色散条纹传感技术的基本原理,从物理光学的角度对色散条纹传感器(DFS)进行了模拟研究,仿真出理论干涉图形,并从中采集能量信号,拟合光强分布曲线,得出测量结果.通过比较在不同波段的采样,提出在CCD上开出窗口采集有效信号的2种方法,借以提高检测精度.色散条纹传感器的检测范围为±50μm,检测精度可以达到几十nm.

When constructing the segmented primary mirror of a maximum aperture telescope,the piston error of segmented mirrors needs testing accurately.In this paper,a dispersed fringe sensor（DFS） was simulated from physical optics,according to the principle of dispersed fringe sensoring technology.DFS interferograms were produced and signals were sampled from them to obtain the result of detection through fitting curve of light distribution.We compared sampling signals in different wavebands and put forward two methods of sampling effective signals by opening window on a CCD camera to improve measuring precision.The measurement range is as large as ± 50μm,and the measurement accuracy is about several tens of nanometers.