仿生声压梯度敏感结构设计及加工方法研究

Design and Microfabrication of Biomimetic Acoustic Pressure Gradient Sensitive Structure

对寄生蝇指向性听力的形成原理进行了说明。以寄生蝇相互耦合的两鼓膜为原形,设计了一种仿生的声压梯度敏感结构。推导了平面简谐波作用于敏感结构的转矩与结构尺寸及声压梯度之间的关系。给出了基于SOI硅片的声压梯度敏感结构加工方法。确定了台阶结构光刻、SOI硅片与玻璃阳极键合、湿法去除SOI硅片基底层等关键工艺的相关工艺参数。器件的加工结果表明,具有三维结构的声压梯度敏感结构可以通过体加工工艺来实现。

The principle of the directional hearing of the parasitoid fly ormia ochracea was introduced.Inspired by the fly＇s mechanically coupled eardrums,a novel MEMS directional biomimetic acoustic pressure gradient sensitive structure was designed.The analytic formulae describing the relationship between the resultant moment of incoming plane wave acting on the structure and the acoustic pressure gradient,structural parameters were derived.A microfabrication process of the sensitive structure was proposed based on silicon on insulator （SOI） wafer.Process parameters of the key fabrication steps such as step photolithography,SOI wafer-glass anodic bonding,handle wafer and buried silicon dioxide removal using wet etching were also decided.The fabrication result has proved that the sensitive structure which has three-dimensional scale can be achieved using bulk micromaching.