薄膜样品X射线能量色散谱仪测试方法研究

Study on the Measurement of X-Ray Energy Dispersive Spectrometer for Thin Solid Film

利用能量色散谱仪(EDS)对铜基材镍磷薄膜样品进行成分分析,研究扫描电镜(SEM)不同加速电压和能谱采集率对薄膜样品所含元素定量结果的影响。结果表明:加速电压影响薄膜样品中各元素绝对定量结果,并对膜层中P、Ni元素的质量比产生一定的影响;但在相同的加速电压条件下,能谱采集率的高低对样品中各元素绝对定量结果以及膜层中P、Ni元素的质量比影响较小。

X-ray energy dispersive spectrometer（EDS） is used to characterize the composition of the Ni-P film on copper substrate.Acceleration voltage of scanning electron microscopy（SEM） and dead time of EDS play important roles in quantitative analysis.Quantitative analysis results for all the elements involved vary with the acceleration voltage.The same is true with the weight ratio of P,Ni.While the dead time of EDS had no obvious influence on the quantity result of all elements in film and the P,Ni ratio.