一种新型的毫米波谐振系统

A novel millimeter wave resonant system

提出一种新型的毫米波谐振系统,该系统由基片集成波导谐振器与多个λ/4驻波谐振器通过磁耦合而成为一个整体。多个λ/4谐振器的谐振频率与相位受基片集成波导谐振器控制。这种毫米波谐振系统的优点是:损耗小,品质因数高,与晶圆级封装(wafer level package,WLP)技术兼容,可以将谐振系统制作到集成电路的封装结构中。这种谐振系统便于与CMOS工艺结合,可以将多个λ/4振荡器功率高效合成起来,以获得较大的毫米波振荡功率输出。

A novel millimeter wave resonant system is presented.The system is comprised of a silicon integrated waveguide resonator and numerous λ/4 standing wave resonators,coupled together by magnetic field as a whole.The resonant frequency and phase of these λ/4 standing wave resonators are controlled by the Silicon Integrated Waveguide Resonator.The merits of this millimeter wave resonant system are：small loss,high quality factor,compatibility with wafer level package technology and being able to be made in the package structure of the integrated circuit.This system can beeasily combined with the CMOS technique and it can synthesis power of lots of λ/4 standing wave resonators with high efficiency so that higher power of millimeter wave could be obtained.