摘要
对薄膜的应用现状、气相沉积法制备薄膜的常规方法及高能精密薄膜制备方法作了综述.认为开发薄膜复合处理工艺,实现制膜过程精密控制,以及节能环保的绿色镀膜将会成为薄膜制备新的趋势.
The application status of thin films,conventional methods of thin films preparation by thermal vapor condensation and other high precison preparation methods were reviewed.It is presented that the development of thin films composite processing,the precise control of preparation processing as well as engergy-saving and environment-protecting film-plating methods will be the new trend of thin films preparation.
出处
《上海工程技术大学学报》
CAS
2010年第2期167-172,共6页
Journal of Shanghai University of Engineering Science
关键词
薄膜
气相沉积法
绿色镀膜
thin film
thermal vapor condensation
green coating
