近场扫描光学显微镜中的一种新型距离控制方法研究

A New Method on Distance Control in Near Field Scanning Optical Microscopy

近场扫描光学显微镜（ＮＳＯＭ）中，切向力的检测有两种方法：光学检测法和非光学检测法．目前普遍采用的非光学检测法，基本上是采用压电陶瓷产生振荡，检测振幅在切向力作用下的衰减，从而控制探针和样品的距离．文中提出了一种新型的近场距离控制方法，即利用双压电片产生振荡和进行检测．实验结果表明，此法可明显提高检测灵敏度．

The presence of shear force in a near field scanning optical microscopy can be detected by optical and nonoptical means. The latter is generally used by the piezoelectric control approach. A bimorph is used to produce the vibration for detecting amplitude decay of shear force and to control the near field distance. The method improves the sensitivity of detection.