摘要
CVD金刚石具有诸多优异性能和特点,在广泛的应用前景。而加工技术是伴随沉积技术的发展而发展起来的。金刚石膜加工技术主要包括切割、成型,研磨抛光和钎焊技术。本文介绍了近年来CVD金刚石加工技术的主要进展,以及有关应用。
With many excellent performances and characteristics, CVD diamond film has a wide application prospect. Its processing technique has developed with the development of deposition technique. The processing technique for CVD diamond film mainly includes cutting, molding, grinding, polishing and brazing. The paper introduces the main progress and related application of the processing technique for CVD diamond film.