非晶硅太阳电池进展和展望

Recent progress and prospect of a Si solar cells

综述了非晶硅（ａ－Ｓｉ）太阳电池在研究、开发和应用方面的新进展。采用Ｈ２稀释和较低衬底温度、防止Ｏ２、Ｎ２等杂质沾污、用氘代替Ｈ２等工艺提高ｉ层质量；在ｐ／ｉ界面间生长适当的缓冲层以得到良好的ｐ／ｉ界面、优化三结迭层电池结构；目前，１ｃｍ２电池和９００ｃｍ２组件的稳定转换效率分别达１４％和１０．２％，为ａ－Ｓｉ电池的大规模应用展现了良好前景。介绍了美国Ｓｏｌａｒｅｘ公司在大面积多结电池组件生产化工艺研究方面的经验，强调严格控制ＴＣＯ的沉积条件是重要的环节。同晶体Ｓｉ电池比较，ａ－Ｓｉ电池生产具有易于进行大面积自动化生产、原材料省、能耗低等特点，使它可能成为建造全球太阳电池发电网的主要侯选者。

Recent progress in research, development and application for a Si solar cells are reviewed. At present, the stable efficiency of conversion for cell with area 1cm 2 and module with area 900cm 2 reaches 14% and 10.2% respectively. The important technics are as follows: Improve the quality of intrinsic layers by means of hydrogen dilution and lower sustrate tempreture. Avoide the contamination of impurities such as O 2、N 2 etc; Replace hydrogen with deuterium; Produce suitable buffer layers to have a good p/i interface and optimization structure of triple juction cell. The technology development for commercialization of a Si based on multijuction modules in solarex is presented. It is emphasized that the deposition of TCO layer must be controllod carefully. The process of a Si solar cells has several advantages over that of crystal si cells: Automatic production of module with large area is more easy to realize, material consumption and energy requirement are less than that of crystal Si cells. Therefore, the a Si cell modules are very suitable for constructing the global energy network equipped with solar cells and international supperconductor grids.