微细特种加工组合系统及应用

Composite system for non-traditional micro machining and its application

为了改善微细特种加工工艺,提出并研究了具有实体工具的微细特种加工的组合技术.对几种微细特种加工工艺进行分析,找出其共同特征.将微细电火花、微细超声、微细电解加工组合在同一系统中.采用了模块化设计,针对该系统研制了基本模块,配备了视频显微系统.用微细电火花工艺加工出直径5μm的微细轴和直径6μm的微细孔以及形状复杂的微结构,用倒置式电火花-超声复合工艺加工出深径比>25的微细孔,用微细超声工艺加工出直径13μm的微细孔,用微细电解工艺加工出直径100μm的微细孔.这种组合扩大了微细特种加工的范围,提高了加工效率.

In order to improve the process of non-traditional micro machining,a composite technology with solid tool was proposed.Several non-traditional micro-machining processes were analyzed and their common features were found out.The micro electro-discharge machining（EDM）,micro ultrasonic machining（USM） and micro electrochemical machining（ECM） were combined in the same system.The module design was used for this system.The basic module was developed,and a video microscopic subsystem was equipped in the system.Then,Ф5 μm micro rods,Ф6 μm micro holes,and microstructures with complicated profile were machined by micro EDM;the micro holes with aspect ratio larger than 25 were machined by EDM with USM in inversion installing;Ф13 μm micro holes were drilled by micro USM;and Ф100 μm micro holes were machined with micro ECM.This kind of combination expands the range of non-traditional micro machining and improves the processing efficiency.