等离子体技术在多晶硅还原炉的应用

Plasma Technology Applications in Polysilicon Reducing Furnace

针对内蒙多晶硅项目,在等离子体发生器对还原炉内部进行加热的条件下,对炉内温度场进行了试验测试,同时采用FLUENT软件对其进行了数值模拟。理论和计算的综合结果表明,等离子体加热技术在多晶硅还原炉中有着良好的加热应用效果。与同类型加热设备卤素灯相比,等离子发生器不仅加热效率高且运行成本相对较低,具有良好的应用前景。

This paper is for polysilicon project in Inner Mongolia. On the condition that plasma generator heat inner of reducing furnace, we test internal temperature field of reducing furnace, while using FLUENT simulating it. Theory and calculation of the consolidated results show that the plasma heating technology in reducing furnace has a good effect of heat application. And compared to the same type of heating equipment, halogen lamps, plasma generator is not only high efficiency in heating and operating costs are relatively low, with good prospects.