双框架微机械陀螺制备关键技术

KEY TECHNIQUES FOR FABRICATION OF TWO-GIMBALS MICROMACHINED GYROSCOPES

研究了对双框架微机械陀螺性能有重要影响的关键制备技术，即不去胶条件下的电铸厚度检测、控制技术，以及结构层内应力的检测、控制技术。在此基础上采用本实验室自对准的准LIGA工艺制备出陀螺结构，其活动区面积为1．0×1．0mm2，框架厚度4μm。经加电测试，已观测到内、外框架在空气中的振动。

The key fabrication techniques of measuring and controlling thickness without removing the phaltoresist, and internal stress in the two-gimbals micromachined gyroscope which have great iafluence on the characteristics of the two-gimbals micromachined gyroscope were investigated. Based on that,the gyroscope structure was fabricated using the self-aligned quasi-LIGA technologies developed in our laboratory. The dimension of active area and thickness of structure layer is 1.0 ×1.0mm2 and 4μm, respectively. The vibration of the inner and outer gimbals in air was observed by applying electrical signal.