摘要
由联苯四羧酸二酐和对苯二胺低温缩聚制备聚酰胺酸前驱体,经拉膜、高温酰亚胺化成功制备了气袋靶用超薄聚酰亚胺薄膜。利用傅里叶红外、白光干涉仪和荧光光谱仪对薄膜和气袋靶进行了表征。经测量,薄膜的平均粗糙度为4.44nm、均方根粗糙度为5.34nm,薄膜装配后形成的气袋靶可承受0.1MPa的大气压。
Precursor of polyamic acid was synthesized by 3,3＇,4,4＇-biphenyltetracarboxylic di-anhydride and 1,4-diaminobenzene,and the corresponding ultrathin film was obtained by pulling process and thermal imidization.Then the obtained film and target were characterized by Fourier transfer infrared spectrometer（FT-IR）,white light interference and X-ray fluorescence spectrometry.The film average roughness is 4.44 nm and root mean square roughness is 5.34 nm.Gas-filled targets made of thin film can afford 0.1 MPa pressure without leaking.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2010年第7期790-793,共4页
Atomic Energy Science and Technology
基金
国家高技术研究发展计划资助项目
关键词
气袋靶
聚酰亚胺
提拉法
gas-filled target
polyimide
pulling process
