色分离光栅的溶胶凝胶化学法制备工艺

Fabrication of Color Separation Gratings by Sol-Gel Method

以锆酸丁酯为源,通过溶胶凝胶法制备了一种光敏ZrO2溶胶,在熔石英表面通过提拉法镀制具有负性光刻胶性质的光敏凝胶薄膜。在此基础上,设计色分离光栅(CSG)的结构,通过二次曝光、显影过程,制备了具有三台阶结构的CSG。对光栅形貌进行表征,周期为210μm,单台阶高度约为500nm,光栅面积为30mm×30mm。采用Nd:YAG激光器对衍射效率进行了测量,测得CSG对355nm激光衍射效率达到约88.4%,1064nm及532nm激光的衍射效率分别为5.7%和4.2%。

The photosensitive ZrO2 sol was prepared from zirconium alkoxide and β-diketone by sol-gel method.The sol was dip coated on fused silex substrate.The films were exposed by high pressure mercury through a mask.The films were developed in ethanol to remove the unirradiated parts after irradiation.This process was repeated,then color separation gratings（CSG）were fabricated.The period of CSG is 210 μm,and the height of single step is about 500 nm.Nd：YAG laser was introduced to examine the diffractive index of CSG.The results of the experimental study of a CSG to separate the frequency tripling（355 nm）light from the basic（1 064 nm）and frequency-doubling（532 nm）light are presented.The intensity of designed diffraction orders amounted to about 88.4% for 355 nm,5.7% for 1 064 nm,4.2% for 532 nm,respectively.