摘要
本文概要叙述了剑桥S250系列扫描电镜的维护维修实例,如常见的故障有电源部分故障、真空系统故障、继电器故障、控制单元故障、显示单元故障等等。
This article is about the maintenance and service experience on the Scanning Electron Microscope of Cambridge Instrument S250-MK2. In this paper We give out some trouble example that happened in Power Supply 、 Vacuum System and Relay.
关键词
扫描电镜
电源
真空系统
继电器
故障检修
Scanning Electron Microscope Power supply Vacuum system Relay
