扭摆式微加速度传感器的优化设计

Optimal Design of Pendulous Acceleration Microsensors

】扭摆式微加速度传感器是一种用于测量运动物体加速度的微型传感器，在许多领域都有极其广泛的应用，是当今微米／纳米技术发展的一个主要方向。文章论述了其结构组成，分析了其工作机理，给出了其设计原则和加工工艺，最后通过实例验证了该设计方法的适用性。

The pendulous acceleration microsensor is a microsensor used for measuring the acceleration of the moving objects. It will play an important role in many areas, and is also the magor direction of the micro/nanometer technology development. The paper describes its structural components, analyses its principle of operation and presents its design principle and fabrication process. Finally, the design method is proved available by an example.